Multi-technology measurements of amorphous carbon films

Materials Research Society Symposium Proceedings

Volumn 872, Issue , 2005, Pages 345-350

  Leng, Jingmin ^a   Opsal, Jon ^a   Pois, Heath ^a   Sorkhabi, Osman ^a   Liu, Xiaoping ^a   Morris, Stephen J ^a  

^a Therma Wave Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BIREFRINGENCE; CARBON; DIELECTRIC MATERIALS; ELLIPSOMETRY; SEMICONDUCTOR DEVICE MANUFACTURE;

AMORPHOUS CARBON; MULTI-TECHNOLOGY MEASUREMENTS;

AMORPHOUS FILMS;

EID: 30644468141     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-872-j17.5     Document Type: Conference Paper

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