Real-time spectroscopic ellipsometry as an in-situ probe of the growth dynamics of amorphous and epitaxial crystal silicon for photovoltaic applications

Materials Research Society Symposium Proceedings

Volumn 862, Issue , 2005, Pages 159-170

  Levi, D H ^a   Teplin, C W ^a   Iwaniczko, E ^a   Yan, Y ^a   Wang, T H ^a   Branz, H M ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; ELLIPSOMETRY; EPITAXIAL GROWTH; HYDROGENATION; PHOTOVOLTAIC EFFECTS;

HOT WIRE CHEMICAL VAPORS; HYDROGENATED AMORPHOUS SILICON;

SILICON;

EID: 30544453554     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-862-a14.2     Document Type: Conference Paper

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