Application of magnetic ferrite electrodeposition and copper chemical mechanical planarization for on-chip analog circuitry

Materials Research Society Symposium Proceedings

Volumn 869, Issue , 2005, Pages 157-162

  Washburn, Cody ^a   Brown, Daniel ^a   Cabacungan, Jay ^a   Venkataraman, Jayanti ^a   Kurinec, Santosh K ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; COPPER; ELECTRODEPOSITION; ELECTROPHORESIS; FERRITE; INDUCTANCE; MAGNETIC MATERIALS; PASSIVE FILTERS; PLASTIC FILMS; SURFACE ACTIVE AGENTS; THIN FILMS;

ANALOG CIRCUITRY; CHEMICAL MECHANICAL PLANARIZATION (CMP); MAGNETIC FERRITE; POLYMERIC THIN FILMS;

ELECTRIC INDUCTORS;

EID: 30544452110     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-869-d2.3     Document Type: Conference Paper

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