Role of molecular structure of complexing/chelating agents in copper CMP slurries

Materials Research Society Symposium Proceedings

Volumn 867, Issue , 2005, Pages 47-52

  Patri, Udaya B ^a   Pandija, S ^a   Babu, S V ^a  

^a Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKALINITY; AMINES; AMINO ACIDS; COPPER; PH EFFECTS; SLURRIES;

CARBON CHAIN; CHELATING AGENTS; SUCCINIC ACID;

MOLECULAR STRUCTURE;

EID: 30544448293     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-867-w1.11     Document Type: Conference Paper

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