A novel technology to create monolithic instruments for micro total analysis systems

Materials Research Society Symposium Proceedings

Volumn 869, Issue , 2005, Pages 119-124

  Seibel, Konstantin ^a   Schölar, Lars ^a   Walder, Marcus ^a   Schäfer, Heiko ^a   Schäfer, André ^a   Pletzer, Tobias ^b   Püschl, René ^a   Waidelich, Michael ^a   Ihmels, Heiko ^a   Ehrhardt, Dietmar ^a   Böhm, Markus ^a  

^a UNIVERSITY OF SIEGEN   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DEPOSITION; ELECTROOSMOSIS; ELECTROPHORESIS; FLUIDICS; MICROPROCESSOR CHIPS;

MICRO TOTAL ANALYSIS SYSTEMS; MICRO-CAPILLARY ELECTROPHORESIS; MONOLITHIC INSTRUMENTS; OPTICAL DETECTION;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 30544444181     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-869-d3.8     Document Type: Conference Paper

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