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Applied Physics A: Materials Science and Processing

Volumn 82, Issue 4 SPEC. ISS., 2006, Pages 679-682

Laser induced formation of periodic nanostructures in silicon covered by SiO2

(3) Liao, Y a Degorce, J Y a Meunier, M a

a ÉCOLE POLYTECHNIQUE DE MONTRÉAL (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FREE ELECTRON LASERS; MELTING; NANOSTRUCTURED MATERIALS; OXYGEN; POLARIZATION; TIME VARYING SYSTEMS;

LOW LASER INTENSITY; THREE-DIMENSIONAL (3D) PERIODIC SILICON NANOSTRUCTURES; TWO-DIMENSIONAL (2D) PERIODIC SILICON NANOSTRUCTURES; YAG LASER IRRADIATION;

SILICON;

EID: 30444434597 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-005-3438-3 Document Type: Article

Times cited : (8)

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