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Volumn 1, Issue 1-2, 2002, Pages 283-287
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Comparison of Three Quantum Correction Models for the Charge Density in MOS Inversion Layers
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Author keywords
charge distribution; density gradient theory; modified local density approximation; quantum mechanical effect
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Indexed keywords
CHARGE DISTRIBUTION;
INVERSION LAYERS;
LOCAL DENSITY APPROXIMATION;
QUANTUM THEORY;
SEMICONDUCTOR DOPING;
SOLS;
DENSITY GRADIENT THEORIES;
DENSITY GRADIENTS;
GATE OXIDE THICKNESS;
HIGH-DENSITY INTEGRATION;
QUANTUM CORRECTION MODELS;
QUANTUM MECHANICAL EFFECTS;
SEMICONDUCTOR-INSULATOR INTERFACE;
SOLID STATE ELECTRONICS;
MOS DEVICES;
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EID: 3042855368
PISSN: 15698025
EISSN: 15728137
Source Type: Journal
DOI: 10.1023/A:1020706414966 Document Type: Article |
Times cited : (11)
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References (8)
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