A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 69-72

  Tsuboi, O ^a   Mi, X ^a   Kouma, N ^a   Okuda, H ^a   Soneda, H ^a   Ueda, S ^a   Ikai, Y ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRODES; ELECTROSTATICS; FREQUENCIES; LASER APPLICATIONS; LASER BEAMS; MICROMACHINING; SCANNING;

LASER BEAM PRINTERS (LBP); MICROMIRRORS; SCANNING SPEED;

MIRRORS;

EID: 3042784786     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. R.A.Conant et al., "A Flat High-frequency Scanning Micromirror", Tech. Digest of Solid-State Sensor and Actuator Workshop, Hilton Head Island, June 4-8, 2000, pp. 6-9
2. H.Miyajima et al., "Product Development of a MEMS Optical Scanner for a Laser Scanning Microscope", Proc. MEMS2002, Las Vegas, January 20-24, 2002, pp.552-554
3. O. Tsuboi et al., "A Rotational Comb-Driven Micromirror with a Large Deflection Angle and Low Drive Voltage" Proc. MEMS2002, Las Vegas, January 20-24, 2002, pp.532-535
4. I. Sawaki et al., "A Micromachined Tracking Mirror for high-Density Optical Disk Memory", Proc. Optical MEMS2001, Okinawa, September 25-28, 2001, pp.67-68
5. H. Schenk et al., "An Electrostatically Excited 2D-Micro-Scanning- Mirror with a In-Plane Configuration of the Driving Electrodes", Proc. MEMS2000, Miyazaki, January 23-27, 2000, pp.473-478