Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVD

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 446-449

  Hoshino, Kazunori ^a   Murakami, Yoichi ^a   Maruyama, Shigeo ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL VAPOR DEPOSITION; ELASTICITY; ELECTROSTATIC DEVICES; ETHANOL; FREQUENCY RESPONSE; HEATING; MECHANICAL PROPERTIES; NATURAL FREQUENCIES; OSCILLATIONS; OXIDATION; RAMAN SCATTERING; REACTION KINETICS; SOLUTIONS; SYNTHESIS (CHEMICAL);

ELECTRO-MECHANICAL MEASUREMENT; MICRO CANTILEVERS; PROBING CANTILEVERS; SINGLE WALLED CARBON NANOTUBES (SWNTS);

CARBON NANOTUBES;

EID: 3042745311     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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