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Volumn 179, Issue , 2004, Pages 79-82
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Understanding gate oxide materials: ELNES of Hf and Zr compounds
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON ENERGY NEAR-EDGE STRUCTURE (ELNES);
FERMI RULES;
GATAN ENFINA ELECTRON SPECTROMETERS;
X-RAY ABSORPTION NEAR-EDGE STRUCTURES (XANES);
ABSORPTION;
ALGORITHMS;
APPROXIMATION THEORY;
CMOS INTEGRATED CIRCUITS;
ELECTRON ENERGY LEVELS;
ELECTRON SPECTROSCOPY;
FERMI LEVEL;
GREEN'S FUNCTION;
LEAKAGE CURRENTS;
OXIDE SUPERCONDUCTORS;
OXYGEN;
PERMITTIVITY;
SIGNAL TO NOISE RATIO;
SILICATES;
X RAYS;
ZIRCONIUM COMPOUNDS;
HAFNIUM COMPOUNDS;
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EID: 3042733924
PISSN: 09513248
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (5)
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