Enhanced production of multi-charged ions using pulse-modulated microwave in a 2.45 GHz electron cyclotron resonance source

Review of Scientific Instruments

Volumn 71, Issue 2, 2000, Pages 657-659

  Kato, Yushi ^a   Kobayashi, Shigeki ^a   Ishii, Shigeyuki ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042685493     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150340     Document Type: Article

References (8)

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7. Y. Kato and S. Ishii, IEEE Proceedings of the 12th International Conference on Ion Implantation Technology, Kyoto, Japan, 1998, pp. 2-157.
8. Y. Kato and S. Ishii, J. Phys. Soc. Jpn. 62, 1221 (1993).