Development of 13 GHz compact electron cyclotron resonance ion source

Review of Scientific Instruments

Volumn 75, Issue 5 PART II, 2004, Pages 1502-1505

  Saitoh, Y ^a   Ohkoshi, K ^a   Arakawa, K ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING SYSTEMS; ELECTRIC POTENTIAL; ELECTROSTATICS; ION BEAMS; ION IMPLANTATION; MATHEMATICAL MODELS; OPTIMIZATION; PARTICLE BEAM INJECTION; PLASMA DENSITY; PLASMAS; SYNCHROTRONS;

ION BEAM CURRENT; ION IRRADIATION; MATERIAL MODIFICATIONS; MEGA ELECTRON-VOLT (MEV); PLASMA CHAMBER;

ELECTRON CYCLOTRON RESONANCE;

EID: 3042662233     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1690452     Document Type: Conference Paper

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