Gate fault isolation and parametric characterization through the use of atomic force probing

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2004, Pages 617-618

  Erickson, A N ^a  

^a Multiprobe Inc   (United States)

Author keywords

AFP; Atomic Force Probing; Dielectric Breakdown; NanoProbing; Parametric Characterization; Pico Current Imaging; Tunneling

Indexed keywords

ATOMIC FORCE PROBING (AFP); DIELECTRIC BREAKDOWN; NANOPROBING; PARAMETRIC CHARACTERIZATION; PICOCURRENT IMAGING; TUNNELING CURRENT;

ATOMIC FORCE MICROSCOPY; ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; GATES (TRANSISTOR); LEAKAGE CURRENTS; OHMIC CONTACTS; SURFACE TOPOGRAPHY;

IMAGING TECHNIQUES;

EID: 3042656419     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. th International Symposium for Testing and Failure Analysis, 2003, pp 413-418.