Phase separation and crystallisation in nanosized spin-on glass films used in microelectronics

Glass Technology

Volumn 45, Issue 2, 2004, Pages 59-61

  Shilova, O ^a  

^a GREBENSHCHIKOV INSTITUTE OF SILICATE CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTALLIZATION; ENERGY DISPERSIVE SPECTROSCOPY; GLASS CERAMICS; HEAT TREATMENT; HIGH RESOLUTION ELECTRON MICROSCOPY; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; OPTICAL SENSORS; PHASE SEPARATION; SEMICONDUCTOR DEVICES; SILICON WAFERS; SOLS; SPIN COATING; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

FRACTAL OBJECTS; INORGANIC DOPANTS; TEMPLATE FILM FORMATION; TEMPLATE SYNTHESIS;

THIN FILMS;

EID: 3042596596     PISSN: 00171050     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (15)

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