'Spin-on glass' films for semiconductor technology

Surface Coatings International Part B: Coatings Transactions

Volumn 86, Issue 3, 2003, Pages 195-202

  Shilova, O A ^a  

^a GREBENSHCHIKOV INSTITUTE OF SILICATE CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL SENSORS; DOPING (ADDITIVES); INORGANIC COATINGS; OPTICAL SENSORS; SEMICONDUCTOR DEVICES; SOL-GELS; SPIN COATING; SYNTHESIS (CHEMICAL);

DOPANTS; INORGANIC ADDITIVES; SPIN-ON-GLASS FILMS;

SEMICONDUCTING FILMS;

GLASS; INORGANIC COMPOUND; ORGANIC COMPOUND; SILICON DERIVATIVE;

ARTICLE; CATALYST; FILM; GAS; GEL; MATERIAL COATING; SEMICONDUCTOR; SENSOR; SYNTHESIS; TECHNOLOGY;

EID: 3042590426     PISSN: 14764865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02699653     Document Type: Article

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