Effect of hydrogenation on misfit dislocations in SiGe/Si structures for photovoltaic applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1737-1739

  Daami, A ^a   Bremond, G ^a   Caymax, M ^b   Poortmans, J ^b  

^a Lab de Physique de la Matiere   (France)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042540236     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590045     Document Type: Article

References (14)

1. E. Borne, J. P. Boyeaux, and A. Laugier, First World Conference on Photovoltaic Energy Conversion, Hawaii, 5-9 December 1994.
2. A. R. Powell, S. S. Iyer, and F. K. LeGoues, Appl. Phys. Lett. 64, 1856 (1994).
3. K. K. Linder, F. C. Zhang, J.-S. Rieh, and P. Bhattacharya, Appl. Phys. Lett. 70, 3224 (1997).
4. W. M. Chen, I. A. Buyanova, W.-X. Ni, G. V. Hansson, and B. Monemar, Appl. Phys. Lett. 70, 369 (1997).
5. T. Sekiguchi, V. V. Kveder, and K. Sumino, J. Appl. Phys. 76, 7882 (1994).
6. V. Arbert-Engels, J. M. G. Tijero, A. Manissadjian, V. Higgs, and K. L. Wang, Appl. Phys. Lett. 61, 2586 (1992).
7. G. Beaucarne, K. Said, T.Vermeulen, F. Duerinckx, J. Poortmans, and J. Nijs, 14th EPVSEC, Barcelona, Spain. 30 June-4 July 1997.
8. J. Weber and M. I. Alonso, Phys. Rev. B 40, 5683 (1989).
9. J. Weber and M. I. Alonso, Proceedings of the International Conference on Science and Technology of Defect Control in Semiconductors, Yokohama, 1989, edited by K. Sumino (Elsevier Science, Amsterdam. 1990), Vol. 2, p. 1453.
10. J.-P. Noël, N. L. Rowell, D. C. Houghton, D. D. Perovic, and A. Wang, J. Electron. Mater. 22, 739 (1993).
11. A. Souifi, G. Brémond, T. Benyattou, D. Durtartre, I. Berbezier, and G. Guillot, J. Vac. Sci. Technol. B 10, 2002 (1992); G. Brémond, A. Souifi, D. Dutartre, and T. Benyattou, Thin Solid Films 222, 60 (1992).
12. A. Souifi, G. Brémond, T. Benyattou, D. Durtartre, I. Berbezier, and G. Guillot, J. Vac. Sci. Technol. B 10, 2002 (1992); G. Brémond, A. Souifi, D. Dutartre, and T. Benyattou, Thin Solid Films 222, 60 (1992).
13. A. Hartman, L. Vescan, C. Dieker, T. Stoica, and H. Luth, Phys. Rev. B 48, 18276 (1993).
14. O. Chretien, Ph.D. thesis, Laboratoire de Physique et Spectroscopie Electronique, Université de Haute Alsace de Mulhouse, France, 1996.