RF inductors with suspended and copper coated thick crystalline silicon spirals for monolithic MEMS LC circuits

IEEE Microwave and Wireless Components Letters

Volumn 15, Issue 12, 2005, Pages 853-855

  Wu, Wengang ^a,b   Huang, Fengyi ^a,c   Li, Yi ^a,b   Zhang, Shaoyong ^a,c   Han, Xiang ^a,b   Li, Zhihong ^a,b   Hao, Yilong ^a,b   Wang, Yangyuan ^a,b  

^a IEEE   (China)

^b PEKING UNIVERSITY   (China)

^c SOUTHEAST UNIVERSITY   (China)

Author keywords

Copper coating; Micro electromechanical systems (MEMS); Monolithic MEMS inductor capacitor circuit; Parameter extraction and simulation; Radio frequency (RF) inductor

Indexed keywords

COPPER COATING; MONOLITHIC MEMS INDUCTOR-CAPACITOR CIRCUIT; PARAMETER EXTRACTION AND SIMULATION; RADIO FREQUENCY (RF) INDUCTOR;

COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SINGLE CRYSTALS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 30344461577     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2005.860009     Document Type: Article

References (5)

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