Theoretical study of the initial stage of the aluminium-induced layer-exchange process

Journal of Crystal Growth

Volumn 287, Issue 2, 2006, Pages 442-445

  Sarikov, Andrey ^a,b   Schneider, Jens ^a   Klein, Juliane ^a   Muske, Martin ^a   Gall, Stefan ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

A1. Computer simulation; A1. Diffusion; A1. Nucleation time; A3. Aluminium induced layer exchange process

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; DIFFUSION; MEMBRANES; NUCLEATION; SILICON;

ACTIVATION ENERGIES OF DIFFUSION COEFFICIENTS; ALUMINIUM-INDUCED LAYER-EXCHANGE PROCESS; NUCLEATION TIME; PERMEABLE MEMBRANE; SI GRAIN NUCLEATION;

ALUMINA;

EID: 30344447693     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.11.061     Document Type: Conference Paper

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