Vanadium oxide thin films deposited on silicon dioxide buffer layers by magnetron sputtering

Thin Solid Films

Volumn 497, Issue 1-2, 2006, Pages 267-269

  Chen, Sihai ^a,b   Ma, Hong ^a   Wang, Shuangbao ^a   Shen, Nan ^a   Xiao, Jing ^a   Zhou, Hao ^a   Zhao, Xiaomei ^a,b   Li, Yi ^a   Yi, Xinjian ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Magnetron sputtering; Silicon dioxide buffer layers; Uncooled focal plane arrays; Vanadium oxide thin films

Indexed keywords

BOLOMETERS; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICA; VANADIUM COMPOUNDS;

SILICON DIOXIDE BUFFER LAYERS; UNCOOLED FOCAL PLANE ARRAYS; VANADIUM OXIDE THIN FILMS;

THIN FILMS;

EID: 30344434987     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.07.221     Document Type: Article

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