Composition dependence of Si1-xGex sputter yield

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 20, 2005, Pages

  Tuboltsev, V ^a   Jalkanen, P ^a   Kolodyazhnaya, M ^a   Raisanen J ^b  

^a UNIVERSITY OF JYVÄSKYLÄ   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 29744437972     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.205434     Document Type: Article

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