Investigations on the effects of plasma-assisted pre-treatment for plasma-assisted chemical vapour deposition TiN coatings on tool steel

Thin Solid Films

Volumn 461, Issue 2, 2004, Pages 277-281

  Gammer, K ^a   Stoiber, M ^b   Wagner, J ^c   Hutter, H ^a   Kullmer, R ^d   Mitterer, C ^b  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

^c MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^d RUBIG GmbH & co KG Engineering   (Austria)

Author keywords

Adhesion; Nitriding hardening; Plasma assisted chemical vapour deposition; Secondary ion mass spectroscopy

Indexed keywords

ADHESION; CLEANING; COLD WORKING; MICROSTRUCTURE; MIXTURES; NITRIDING; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SECONDARY ION MASS SPECTROMETRY; STEEL; X RAY DIFFRACTION ANALYSIS;

NITRIDING HARDENING; PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; TIN COATINGS; TOOL STEELS;

TITANIUM NITRIDE;

EID: 2942750519     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.02.013     Document Type: Article

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