Chemical and physical sputtering of aluminum and gold samples using Ar-H2 DC-glow discharges

Surface and Coatings Technology

Volumn 135, Issue 2-3, 2001, Pages 299-306

  Budtz Jorgensen C V ^a   Kringhoj P ^a   Nielsen, J F ^a   Bottiger J ^a  

^a AARHUS UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ARGON; ELECTRIC CURRENTS; GLOW DISCHARGES; GOLD; HYDROGEN; SPECTROSCOPIC ANALYSIS;

GLOW DISCHARGE MASS SPECTROSCOPY; REACTIVE SPUTTERING;

SPUTTERING;

EID: 0035148163     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01085-9     Document Type: Article

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