A prealigned process of integrating optical waveguides with microfluidic devices

IEEE Photonics Technology Letters

Volumn 16, Issue 6, 2004, Pages 1525-1527

  Lien, Victor ^a   Berdichevsky, Yevgeny ^a   Lo, Yu Hwa ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Biosensors; Fabrication; Integrated optics; Optical waveguides

Indexed keywords

BIOSENSORS; HETEROJUNCTIONS; LIGHT EMISSION; OPTICAL FIBER COUPLING;

MICROFLUIDIC DEVICES; WAVEGUIDE CHANNEL ALIGNMENT;

OPTICAL WAVEGUIDES;

EID: 2942704290     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.826774     Document Type: Article

References (14)

1. P. C. H. Li and D. J. Harrison, "Transport, manipulation, and reaction of biological cells on-chip using electrokinetic effects," Anal. Chem., vol. 69, pp. 1564-1568, 1997.
2. R. H. Carlson, C. Gabel, S. Chan, and R. H. Austin, "Activation and sorting of human white blood cells," Biomed. Microdevices, vol. 1, pp. 39-47, 1998.
3. A. Y. Fu, S. Spence, A. Scherer, F. H. Arnold, and S. R. Quake, "A microfabricated fluorescence-activated cell sorter," Nature Biotechnology, vol. 17, pp. 1109-1111, 1999.
4. D. Cristea, F. Craciunoiu, M. Modreanu, and I. Cernica, "Photonic circuits integrated with CMOS compatible photodetectors," Opt. Materials, vol. 17, pp. 201-205, 2001.
5. J. Kruger, K. Singh, A. O'Neill, C. Jackson, A. Morrison, and P. O'Brien, "Development of a microfluidic device for fluorescence activated cell sorting," J. Micromech. Microeng., vol. 12, pp. 486-494, 2002.
6. J. N. McMullin, "Laser fabrication of integrated microfluidic/micro-optic systems," in Proc. ICAPT 2000, 2000, pp. 1050-1055.
7. O. J. A. Schueller, X.-M. Zhao, G. M. Whitesides, S. P. Smith, and M. Prentiss, "Fabrication of liquid-core waveguides by soft lithography," Adv. Mat., vol. 11, pp. 37-41, 1999.
8. O. Leistiko and P. F. Jensen, "Integrated bio/chemical microsystems employing optical detection: The clip-on," J. Micromech. Microeng., vol. 8, pp. 148-150, 1998.
9. L. Cui, T. Zhang, and H. Morgan, "Optical particle detection integrated in a dielectrophoretic lab-on-a-chip," J. Micromech. Microeng., vol. 12, pp. 7-12, 2002.
10. M. L. Chabinyc, D. T. Chiu, J. C. McDonald, A. D. Stroock, J. F. Christian, A. M. Karger, and G. M. Whitesides, "An integrated fluorescence detection system in poly(dimethylsiloxane) for microfluidic applications," Anal. Chem., vol. 73, pp. 4491-4498, 2001.
11. P. Friis, K. Hoppe, O. Leistiko, K. B. Mogensen, J. Hubner, and J. P. Kutter, "Monolithic integration of microfluidic channels and optical waveguides in silica on silicon," Appl. Opt., vol. 40, pp. 6246-6251, 2001.
12. J. M. Ruano, V. Benoit, J. S. Aitchison, and J. M. Cooper, "Flame hydrolysis deposition of glass on silicon for the integration of optical and microfluidic devices," Anal. Chem., vol. 72, pp. 1093-1097, 2000.
13. Y. Xia and G. M. Whitesides, "Soft lithography," Annu. Rev. Mater. Sci., vol. 28, pp. 153-184, 1998.
14. Y. Berdichevsky, J. Khandurina, A. Guttman, and Y.-H. Lo, "UV/Ozone modification of poly(dimethylsiloxane) microfluidic channel," Sens. Actuators B, vol. 97, pp. 402-408, 2004, to be published.