Market opportunities for advanced MEMS accelerometers and overview of actual capabilities vs. required specifications

Record - IEEE PLANS, Position Location and Navigation Symposium

Volumn , Issue , 2004, Pages 78-82

  Stauffer, Jean Michel ^a  

^a Colibrys SA ^*  (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; AVIATION; COST EFFECTIVENESS; MARKETING; MICROMACHINING; ROBUSTNESS (CONTROL SYSTEMS); STANDARDS;

EVENT DETECTION; GUN-HARD SHOCKS; MEMS ACCELERATION SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 2942641943     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Jean-Mi Stauffer, Bahram Arbab, "Miniaturized high stability MEMS accelerometers for harsh environments", 2003, Proceedings Sensor expo
2. F. Rudolf, H. de Lambilly "Customised Instrumentation Grade MEMS Accelerometer", 1998, Proceedings Sensor expo, PP175-181
3. Neil Barbour, George Schmidt "Inertial sensor technology trends", 2001, IEEE Sensors journal, PP 332-339
4. Cenk Acar, Andrei M Shkel, "Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers", 2003, Journal of micromechanics and microengineering, PP 634-645
5. US patent 5551294, "Micromachined measuring cell with arm supported sensor"