Effect of RuO2 growth temperature on ferroelectric properties of RuO2/Pb(Zr,Ti)O3/RuO2/Pt capacitors

Applied Physics Letters

Volumn 76, Issue 10, 2000, Pages 1318-1320

  Norga, G J ^a   Fè, Laura ^a   Wouters, D J ^a   Maes, H E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001125067     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126021     Document Type: Article

References (6)

1. H. N. Al-Shareef, B. A. Tuttle, W. L. Warren, T. J. Headley, D. Dimos, J. A. Voigt, and R. D. Nasby, J. Appl. Phys. 79, 1013 (1996).
2. D. J. Wouters, G. Willems, E.-U. Lee, and H. E. Maes, Integr. Ferroelectr. 15, 79 (1997).
3. R. Nouwen, J. Mullens, D. Franco, J. Yperman, and L. C. Van Poucke, Vib. Spectrosc. 10, 291 (1996).
4. G. Norga, S. Jing, L. Fe, D. J. Wouters, H. Bender, and H. E. Maes, J. Mater. Res. (to be published).
5. T. Maeder, P. Muralt, and L. Sagalowicz. Thin Solid Films 345, 300 (1999).
6. G. R. Bai, I-Fei Tsu, A. Wang, C. M. Foster, C. E. Murray, and V. P. Dravid. Appl. Phys. Lett. 72, 13 (1998).