High temperature ion beam erosion of polytetrafluoroethylene

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 318-322

  Adami, M ^a   Guzman, L ^a   Man, B Y ^a   Miotello, A ^a   Ossi, P M ^b  

^a UNIVERSITY OF TRENTO   (Italy)

^b POLITECNICO DI MILANO   (Italy)

Author keywords

Ion beam erosion; Microfabrication; PTFE

Indexed keywords

COMPOSITE MICROMECHANICS; CROSSLINKING; EROSION; FABRICATION; HIGH TEMPERATURE EFFECTS; ION BEAMS; ION BOMBARDMENT; POLISHING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

ION BEAM EROSION; MICROFABRICATION;

POLYTETRAFLUOROETHYLENES;

EID: 2942597655     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.139     Document Type: Conference Paper

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