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Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 32-36
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Simulation of the growth dynamics of amorphous and microcrystalline silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
CRYSTALLINE MATERIALS;
DESORPTION;
FILM GROWTH;
MATHEMATICAL MODELS;
MOLECULAR BEAM EPITAXY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
CRYSTALLINE FRACTION;
DYNAMICAL GROWTH MODEL;
LOCAL RELAXATION;
RANDOM DEPOSITION;
SILICON;
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EID: 2942594132
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2004.02.016 Document Type: Conference Paper |
Times cited : (12)
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References (9)
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