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Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 32-36

Simulation of the growth dynamics of amorphous and microcrystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DESORPTION; FILM GROWTH; MATHEMATICAL MODELS; MOLECULAR BEAM EPITAXY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

EID: 2942594132     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.02.016     Document Type: Conference Paper
Times cited : (12)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.