High-resolution primary ion beam probe for SIMS

Applied Surface Science

Volumn 231-232, Issue , 2004, Pages 926-929

  Guharay, S K ^a   Douglass, S ^a   Orloff, J ^b  

^a FM Technologies Inc   (United States)

^b The Institute for Research in Electronics and Applied Physics   (United States)

Author keywords

High resolution SIMS; Oxygen ions; Plasma source

Indexed keywords

ELECTRODES; ELECTRON BEAMS; ION BEAMS; LENSES; NEGATIVE IONS; OXYGEN; PLASMAS; PROBLEM SOLVING; SENSITIVITY ANALYSIS;

HIGH-RESOLUTION SIMS; INSTRUMENTAL PERFORMANCE; OXYGEN IONS; PLASMA SOURCE;

SECONDARY ION MASS SPECTROMETRY;

EID: 2942558643     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.174     Document Type: Conference Paper

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