Erosion behaviour and pattern transfer accuracy of protecting masks for micro-abrasive blasting

Journal of Materials Processing Technology

Volumn 149, Issue 1-3, 2004, Pages 43-49

  Achtsnick, M ^a   Drabbe, J ^a   Hoogstrate, A M ^a   Karpuschewski, B ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Erosion; MEMS; Micro abrasive blasting

Indexed keywords

AIR FILTERS; BLAST FINISHING; COMPRESSED AIR; DEFORMATION; ELASTOMERS; EROSION; HERMETIC SEALS; MASKS; MICROELECTROMECHANICAL DEVICES; OPTICAL MATERIALS; PARTICLE BEAMS; TENSILE PROPERTIES; ULTRASONIC EFFECTS; VELOCITY MEASUREMENT;

BLAST ANGLE; MICRO-ABRASIVE BLASTING; TENSILE ELONGATION; VELOCITY COEFFICIENT;

ABRASIVES;

EID: 2942544475     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2003.10.037     Document Type: Conference Paper

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