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Volumn 58, Issue 19, 2004, Pages 2345-2349
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An investigation of nanoindentation creep in polycrystalline Cu thin film
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Author keywords
Creep; Nanoindentation; Strain burst; Stress exponent
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Indexed keywords
ALCOHOLS;
COPPER;
CREEP;
DEFORMATION;
GRAIN SIZE AND SHAPE;
INDENTATION;
MAGNETRON SPUTTERING;
NUCLEATION;
PLASMA HEATING;
SILICON WAFERS;
TRANSMISSION ELECTRON MICROSCOPY;
DEPTH SENSING;
NANOINDENTATION;
STRAIN BURST;
STRESS EXPONENT;
THIN FILMS;
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EID: 2942541608
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2004.02.043 Document Type: Article |
Times cited : (38)
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References (14)
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