Multivariate statistical analysis of time-of-flight secondary ion mass spectrometry images using AXSIA

Applied Surface Science

Volumn 231-232, Issue , 2004, Pages 230-234

  Ohlhausen, J A Tony ^a   Keenan, M R ^a   Kotula, P G ^a   Peebles, D E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

AXSIA; Components; Multivariate; Statistical; TOF SIMS

Indexed keywords

ALGORITHMS; COMPUTER SOFTWARE; IMAGE ANALYSIS; MICROELECTROMECHANICAL DEVICES; PRINCIPAL COMPONENT ANALYSIS; SECONDARY ION MASS SPECTROMETRY; SIGNAL TO NOISE RATIO; STATISTICAL METHODS;

DATASETS; MULTIVARIATES; SPECTRAL IMAGES;

SURFACE PROPERTIES;

EID: 2942528990     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.020     Document Type: Conference Paper

References (3)

1. Kotula P.G., Keenan M.R., Michael J.R. Microsci. Microanal. 9:2003;1.
2. M.R. Keenan, P.G. Kotula, US Patent 6,584,413, June 24 2003.
3. M.R. Keenan, P.G. Kotula, these proceedings.