A micromechanical variable optical attenuator based on EDM micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4928, Issue , 2002, Pages 225-227

  Cao, Zhonghui ^a   Yuan, Ye ^a   Bao, Junfeng ^a   Wu, X ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

EDM (Electrical Discharge Machining); MEMS; Optical aftenuators; WDM networks

Indexed keywords

ELECTRIC DISCHARGE MACHINING; ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVE ATTENUATION; GOLD COATINGS; MEMS;

ADD/DROP MULTIPLEXERS; DISCRETE ARRAYS; ELECTRICAL DISCHARGE MACHINING; ENABLING TECHNOLOGIES; MICRO-MECHANICAL; OPTICAL AFTENUATORS; VARIABLE OPTICAL ATTENUATORS; WDM NETWORKS;

MICROMACHINING;

EID: 2942519409     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.483177     Document Type: Conference Paper

References (6)

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