Fabrication of ferroelectrics LiNbO3 thin films by pseudospark electron beams

Vacuum

Volumn 75, Issue 2, 2004, Pages 99-104

  Wen, X W ^a   Jiang, X L ^b   Han, L J ^c   Tan, Y P ^b  

^a TSINGHUA UNIVERSITY   (China)

^b BEIHANG UNIVERSITY   (China)

^c NONE

Author keywords

Electron beam; Ferroelectrics film; Film deposition

Indexed keywords

COST EFFECTIVENESS; CRYSTALLINE MATERIALS; CRYSTALLIZATION; ELECTRON BEAMS; FERROELECTRIC MATERIALS; HIGH TEMPERATURE EFFECTS; LITHIUM NIOBATE; NUCLEATION; PHOTOELECTRICITY; POWER ELECTRONICS; SURFACE STRUCTURE; X RAY DIFFRACTION;

ELECTRON BEAM DEPOSITION (PED); FERROELECTRICS FILM; FILM DEPOSITION; FILM QUALITY; PHASE COMPOSITIONS;

THIN FILMS;

EID: 2942514769     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.070     Document Type: Article

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