BLT and Pt nanotubes for high-density semiconductor memories

Journal of the Korean Physical Society

Volumn 47, Issue SUPPL. 3, 2005, Pages

  Shaislamov, U A ^a   Seo, B I ^a   Lee, S J ^a   Kim, I S ^a   Yang, B ^a   Hong, S K ^b  

^a Kumoh National Institute of Technology   (South Korea)

^b Hynix Semiconductor Inc   (South Korea)

Author keywords

Anodization; BLT; Nanotube; Porous alumina; RTA

Indexed keywords

EID: 29344443333     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)

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