Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5879, Issue , 2005, Pages 1-8

  Kim, Jong Ahn ^a   Kim, Jae Wan ^a   Park, Byong Chon ^a   Eom, Tae Bong ^a   Kang, Chu Shik ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Magnification standard; Metrological atomic force microscope; Optical diffractometer; Two dimensional grating

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DIFFRACTOMETERS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; STANDARDS;

MAGNIFICATION STANDARD; METROLOGICAL ATOMIC FORCE MICROSCOPE; OPTICAL DIFFRACTOMETER; TWO-DIMENSIONAL GRATING;

DIFFRACTION GRATINGS;

EID: 29244474653     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.614786     Document Type: Conference Paper

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