Sheet resistance measurement of thin metallic films and stripes at both 130 GHz and DC

IEEE Transactions on Instrumentation and Measurement

Volumn 54, Issue 6, 2005, Pages 2412-2415

  Lee, Ming Han John ^a   Collier, Richard J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Aluminum; Microwave measurement; Nichrome; Sheet resistance; Stripes resistance; Thin films; Wire resistance

Indexed keywords

CAPACITANCE; DIELECTRIC WAVEGUIDES; ELECTRIC FIELD EFFECTS; MICROWAVE MEASUREMENT; PROBES; THIN FILMS;

SHEET RESISTANCE; STRIPES RESISTANCE; THIN METALLIC FILMS; WIRE RESISTANCE;

ALUMINUM SHEET;

EID: 29244470564     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2005.858536     Document Type: Article

References (8)

1. R. J. Collier and D. G. Hasko, "Measurement of the sheet resistance of resistive films on thin substrates from 120 to 175GHz using dielectric waveguides," J. Appl. Phys., vol. 91, no. 4, pp. 2547-2549, 2002.
2. S. M. Sze, Semiconductor Device: Physics and Technology, New York: Wiley, 1985.
3. 3," J. Appl. Phys., vol. 93, no. 2, pp. 1291-1297, 2003.
4. 3 ferroelectric thin films," Appl. Phys. Lett., vol. 62, no. 15, pp. 1845-1847, 1993.
5. H. Bosman, Y. Y. lau, and R. M. Gilgenbach, "Microwave absorption on a thin film," Appl. Phys. Lett., vol. 82, no. 9, pp. 1353-1355, 2003.
6. D. E. Steinhauer, C. P. Vlhacos, S. K. Dutta, B. J. Feenstra, F. C. Weelstood, and S. M. Anlge, "Quantitative imaging of sheet resistance with a scanning near-field microwave microscope," Appl. Phys. Lett., vol. 72, no. 7, pp. 861-863, 1998.
7. 3-x thin films for magnetically tunable filters," Appl. Phys. Lett., vol. 74, no. 5, pp. 750-752, 1999.
8. P. R. Young, private communication.