Characterization of hydrogenated amorphous silicon thin films prepared by magnetron sputtering

Journal of Non-Crystalline Solids

Volumn 352, Issue 1, 2006, Pages 18-23

  Hossain, Maruf ^a   Abu Safe, Husam H ^a   Naseem, Hameed ^a   Brown, William D ^a  

^a 3202 Bell Engineering Center   (United States)

Author keywords

FTIR measurements; Photovoltaics; Silicon; Sputtering; X ray diffraction

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; HYDROGENATION; MAGNETRON SPUTTERING; PHOTOVOLTAIC EFFECTS; PLASMAS; THIN FILMS; X RAY DIFFRACTION;

FTIR MEASUREMENTS; HYDROGENATED FILMS; PHOTOVOLTAICS; RADIO FREQUENCY (RF) POWER;

AMORPHOUS SILICON;

EID: 29244464770     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.11.023     Document Type: Article

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