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Volumn 5878, Issue , 2005, Pages 1-8

New configuration of channeled spectropolarimeter for snapshot polarimetric measurement of materials

Author keywords

Channeled spectropolarimeter; Channeled spectroscopic ellipsometry; Channeled spectrum; Multiple order retarder; Snapshot; Spectroscopic ellipsometer

Indexed keywords

ELECTROOPTICAL EFFECTS; LIGHT MODULATORS; LIGHT POLARIZATION; LIGHT SOURCES;

EID: 29244450207     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616298     Document Type: Conference Paper
Times cited : (14)

References (7)
  • 1
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    • Recent progress in thin film growth analysis by multichanenel spectroscopic ellipsometry
    • R. W. Collins, J. Koh, H. Fujiwara, et al., "Recent progress in thin film growth analysis by multichanenel spectroscopic ellipsometry," Appl. Surf. Sci. 154455, pp. 217-228, 2000.
    • (2000) Appl. Surf. Sci. , vol.154-155 , pp. 217-228
    • Collins, R.W.1    Koh, J.2    Fujiwara, H.3
  • 2
    • 0000023418 scopus 로고    scopus 로고
    • Spectroscopic polarimetry with a channeled spectrum
    • K. Oka and T. Kato, "Spectroscopic polarimetry with a channeled spectrum," Opt. Lett. 24, pp. 1475-1477, 11 1999.
    • (1999) Opt. Lett. , vol.24 , pp. 1475-1477
    • Oka, K.1    Kato, T.2
  • 4
    • 0001583920 scopus 로고
    • Automatic rotating element ellipsometers: Calibration, operation, and real-time applications
    • R. W. Collins, "Automatic rotating element ellipsometers: Calibration, operation, and real-time applications," Rev. Sci. Instrum. 61(8), pp. 2029-2062, 1990.
    • (1990) Rev. Sci. Instrum. , vol.61 , Issue.8 , pp. 2029-2062
    • Collins, R.W.1
  • 5
    • 0020126962 scopus 로고
    • Optical constants for silicon at 300 and 10 K determined from 1.64 to 4.73 eV by ellipsometry
    • G. E. Jellison, Jr. and F. A. Modine, "Optical constants for silicon at 300 and 10 K determined from 1.64 to 4.73 eV by ellipsometry," J. Appl. Phys. 53(5), pp. 3745-3753, 1982.
    • (1982) J. Appl. Phys. , vol.53 , Issue.5 , pp. 3745-3753
    • Jellison Jr., G.E.1    Modine, F.A.2
  • 7
    • 0019927495 scopus 로고
    • Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry
    • M. Takeda, H. Ina, and S. Kobayashi, "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72(1), pp. 156-160, 1982.
    • (1982) J. Opt. Soc. Am. , vol.72 , Issue.1 , pp. 156-160
    • Takeda, M.1    Ina, H.2    Kobayashi, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.