Fabricating low-loss hollow optical waveguides via amorphous silicon bonding using dilute KOH solvent

IEEE Photonics Technology Letters

Volumn 17, Issue 12, 2005, Pages 2592-2594

  Lo, Shih Shou ^a   Chiu, Hua Kung ^a   Chen, Chii Chang ^a   Hsu, Shih Chieh ^a   Liu, Cheng Yi ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Bonding; Hollow; Optical waveguide; Wafer bonding

Indexed keywords

AMORPHOUS SILICON; BONDING; MIRRORS; OPTOELECTRONIC DEVICES; POTASSIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SOLVENTS; THIN FILMS;

HOLLOW OPTICAL WAVEGIUDES; POTASSIUM HYDROXIDE; WAFER BONDING;

OPTICAL WAVEGUIDES;

EID: 29244435806     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.859137     Document Type: Article

References (8)

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