Dual-focus laser micro-machining

Journal of Modern Optics

Volumn 52, Issue 17, 2005, Pages 2603-2611

  Tan, B ^a   Venkatakrishnan, K ^b  

^a RYERSON UNIVERSITY   (Canada)

^b Xsil Ltd   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SILICON; SUBSTRATES; ULTRAVIOLET RADIATION;

FOCAL POINTS; LASER POWER;

LASER BEAMS;

EID: 29144475384     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500340500227745     Document Type: Article

References (3)

1. P. McLennan, Rethinking laser lenses. Industrial Laser Solutions for Manufacturing, July 2000.
2. S. Witanachchi, A.M. Miyawa, P. Mukherjee, Mater. Res. Soc. Symp. 617 J3.6.1-J3.6.6 (2000).
3. A. Self, Appl. Opt. 22 658 (1983).