Highly ionized carbon plasma generation by dual-laser ablation for diamond-like carbon film growth

Materials Research Society Symposium - Proceedings

Volumn 617, Issue , 2000, Pages

  Witanachchi, S ^a   Miyawa, A M ^a   Mukherjee, P ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; EMISSION SPECTROSCOPY; FILM GROWTH; IONIZATION; LASER ABLATION; LASER PULSES; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES;

DUAL-LASER ABLATED CARBON PLUMES;

DIAMOND LIKE CARBON FILMS;

EID: 0034438915     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-617-j3.6     Document Type: Conference Paper

References (16)