Subcritical carbon dioxide assisted polymer nanofabrication at low temperatures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3202-3204

  Yang, Yong ^a   Lee, Ly James ^a   Lu, Wu ^a  

^a Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHIPS; POLYMER NANOFABRICATION; POLYMER SURFACES; SUBCRITICAL FLUIDS;

CARBON DIOXIDE; GLASS TRANSITION; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; ORGANIC SOLVENTS;

POLYMERS;

EID: 29044445645     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2134714     Document Type: Article

References (11)

1. H. Becker and C. Gartner, Electrophoresis 21, 12 (2000).
2. K. R. King, C. Wang, J. P. Vacanti, and J. T. Borenstein, Mater. Res. Soc. Symp. Proc. 729, 3 (2002).
3. J. L. Keddie, R. A. L. Jones, and R. A. Cory, Europhys. Lett. 27, 59 (1994).
4. J. A. Forrest and K. Dalnoki-Veress, Adv. Colloid Interface Sci. 94, 167 (2001).
5. Y. M. Boiko and R. E. Prud'homme, Macromolecules 0024-9297 10.1021/ma960002x 30, 3708 (1997); Y. M. Boiko and R. E. Prud'homme, Macromolecules 31, 6620 (1998).
6. Y. M. Boiko and R. E. Prud'homme, Macromolecules 0024-9297 10.1021/ma960002x 30, 3708 (1997); Y. M. Boiko and R. E. Prud'homme, Macromolecules 31, 6620 (1998).
7. Y. Yang, C. Zeng, and L. J. Lee, Adv. Mater. (Weinheim, Ger.) 16, 560 (2004).
8. Y. Xia, J. A. Rogers, K. E. Paul, and G. M. Whitesides, Chem. Rev. (Washington, D.C.) 99, 1823 (1999).
9. Y. Yang and L. J. Lee, Annu. Tech. Conf.-Soc. Plast. Eng. 63, 2497 (2005).
10. Y. Yang, S. Basu, D. L. Tomasko, L. J. Lee, and S. T. Yang, Biomaterials 26, 2585 (2005).
11. R. M. Winter and C. Steffan, Proceedings of the Annual Meeting of the Adhesion Society 25, 466 (2002).