Direct-write e-beam patterning of stimuli-responsive hydrogel nanostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3124-3128

  Tirumala, Vijay R ^a,b   Divan, Ralu ^a   Ocola, Leonidas E ^a   Mancini, Derrick C ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT-WRITE E-BEAM PATTERNING; HYDROGEL NANOSTRUCTURES; LIQUID MEDIA; PATTERNED MICROSTRUCTURES;

HYDROGELS; IRRADIATION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PHOTOPOLYMERIZATION; SWELLING; ULTRAVIOLET RADIATION;

ELECTRON BEAM LITHOGRAPHY;

EID: 29044441675     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2062649     Document Type: Article

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