SCOPUS 정보 검색 플랫폼

Volumn 200, Issue 5-6, 2005, Pages 1669-1675

Structure and mechanical properties of Cr-Zr-N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources

(4) Kim, GwangSeok a Kim, BomSok a Lee, SangYul a Hahn, JunHee b

a Hankuk Aviation University (South Korea)

b Korea Research Institute of Standards and Science (South Korea)

Author keywords

CFUBMS; Cr Zr N; Hardness; Ternary nitride coating; Wear property

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; FILMS; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; NITRIDES; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); WEAR OF MATERIALS; X RAY DIFFRACTION;

CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; TERNARY NITRIDE COATING;

PROTECTIVE COATINGS;

COATING;

EID: 28944437233 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.101 Document Type: Article

Times cited : (80)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.