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Volumn 13, Issue 25, 2005, Pages 10292-10301

High-extinction-ratio micro polarizing beam splitter for short wavelength optical storage applications

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; OPTICAL PROPERTIES; POLARIZATION; SILICON NITRIDE;

EID: 28944434034     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.010292     Document Type: Article
Times cited : (7)

References (7)
  • 1
    • 0032122681 scopus 로고    scopus 로고
    • Surface micromachined integrated optical polarization beam splitter
    • C. Pu, Z. Zhu, and Y. H. Lo, "Surface micromachined integrated optical polarization beam splitter," IEEE/Photon. Technol. Lett. 10, 988-990 (1998).
    • (1998) IEEE/Photon. Technol. Lett. , vol.10 , pp. 988-990
    • Pu, C.1    Zhu, Z.2    Lo, Y.H.3
  • 5
    • 0030487321 scopus 로고    scopus 로고
    • LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design
    • J. G. E. Gardeniers, H. A. C. Tilmans and C. C. G. Visser, "LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design," J. Vac. Sci. Technol. A, 14, 2879-2892 (1996).
    • (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 2879-2892
    • Gardeniers, J.G.E.1    Tilmans, H.A.C.2    Visser, C.C.G.3
  • 6
    • 21844521710 scopus 로고
    • Influence of annealing on elastic properties of LPCVD silicon nitride and LPCVD polysilicon
    • D. Maier-Schneider, A. Ersoy, J. Maibach, D. Schneider, and E. Obermeier, "Influence of annealing on elastic properties of LPCVD silicon nitride and LPCVD polysilicon," Sens. Materials 7, 121-129 (1995).
    • (1995) Sens. Materials , vol.7 , pp. 121-129
    • Maier-Schneider, D.1    Ersoy, A.2    Maibach, J.3    Schneider, D.4    Obermeier, E.5
  • 7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.