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Volumn 200, Issue 5-6, 2005, Pages 1945-1949

In vitro investigation of hemocompatibility of hydrophilic SiNx:H films fabricated by plasma-enhanced chemical vapor deposition

Author keywords

BioMEMS; Hemocompatibility; Hydrophilicity; Plasma enhanced chemical vapor deposition; Silicon nitride films

Indexed keywords

ADHESION; CHEMICAL ACTIVATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROPHILICITY; INTERFACIAL ENERGY; MEDICAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 28844501778     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.08.068     Document Type: Article
Times cited : (18)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.