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Volumn 200, Issue 5-6, 2005, Pages 1945-1949
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In vitro investigation of hemocompatibility of hydrophilic SiNx:H films fabricated by plasma-enhanced chemical vapor deposition
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Author keywords
BioMEMS; Hemocompatibility; Hydrophilicity; Plasma enhanced chemical vapor deposition; Silicon nitride films
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Indexed keywords
ADHESION;
CHEMICAL ACTIVATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROPHILICITY;
INTERFACIAL ENERGY;
MEDICAL APPLICATIONS;
MICROELECTROMECHANICAL DEVICES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SILICON NITRIDE;
SYNTHESIS (CHEMICAL);
X RAY PHOTOELECTRON SPECTROSCOPY;
BIOMEDICAL MICROELECTROMECHANICAL SYSTEMS (BIOMEMS);
HEMOCOMPATIBILITY;
SILICON NITRIDE FILMS;
AMORPHOUS FILMS;
HYDROPHILICITY;
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EID: 28844501778
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.068 Document Type: Article |
Times cited : (18)
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References (27)
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