XPS spectra analysis with quantitative data criterion

Advanced Performance Materials

Volumn 4, Issue 2, 1997, Pages 161-164

  Galayev, A A ^a   Parkhomenko, Yu N ^a   Borun, A F ^a  

^a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; HIGH TEMPERATURE EFFECTS; ION BEAMS; ION IMPLANTATION; MATHEMATICAL MODELS; PHASE COMPOSITION; SILICON ON INSULATOR TECHNOLOGY; STOICHIOMETRY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON CHEMICAL STATE PEAKS; SILICON OXYNITRID;

SILICON WAFERS;

EID: 0031119625     PISSN: 09291881     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1008639428729     Document Type: Article

References (7)