Solid state MAS NMR spectroscopic characterization of plasma damage and UV modification of low k dielectric films

Materials Research Society Symposium Proceedings

Volumn 863, Issue , 2005, Pages 35-40

  Abell, Thomas ^a   Houthoofd, Kristof ^b   Iacopi, Francesca ^c   Grobet, Piet ^b   Maex, Karen ^b,c  

^a Intel Corporation Belgium   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; DIELECTRIC FILMS; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NUCLEAR MAGNETIC RESONANCE; ULTRAVIOLET RADIATION;

ATOMIC STRUCTURE; PLASMA DAMAGE; UV CURING;

PLASMA APPLICATIONS;

EID: 28844496364     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-863-b1.8     Document Type: Conference Paper

References (8)

1. M.Bohr, Tech. Dig., Int. Electron Devices Meet., IEEE Electron Devices Society, Washington D.C. USA, 1995, p.241, December 10-13.
2. F. Iacopi, Y. Travaly, M. Stucchi, H. Struyf, S. Peelers, R. Jonckheere, L.H.A. Leunissen, Zs. Tokei, V. Sutcliffe, O. Richard, M. Van Hove, and K. Maex, Proceedings of the 2004 MRS Spring Meeting, San Francisco, CA, (Mater.Res.Soc.Proc. 812, Pittsburgh, PA, 2004) F1.5
3. T.Abell, D.Shamiryan, J.Schuhmacher, W.Besling, V.Sutcliffe, K.Maex in Advanced Metallization Conference 2002, (MRS, 2003) pp.717-723.
4. T.Abell and K.Maex, Microelec.Engr., 76, p. 16-19, (2004)
5. J.Lee, M.Moinpour, H.C.Liu, T.Abell, Proceedings of the 2003 MRS Spring Meeting, San Francisco, CA, (Mater.Res.Soc.Proc. 767, Pittsburgh, PA, 2003) F7.4
6. F. Iacopi, D. Degryse, I. Vos, M. Patz, and K.Maex, Proceedings of the 2003 MRS Fall Meeting, Boston, MA, (Mater.Res.Soc.Proc. 795, Pittsburgh, PA, 2004) U4.3
7. F.Iacopi, et al., to be published Proceedings of the 2005 MRS Spring Meeting, San Francisco, CA, (Mater.Res.Soc.Proc. tbd, Pittsburgh, PA, 2005) B3.9
8. P.Y.Mabboux and K.K.Gleason, Jour. Electrochem. Society, 152, (1) F7-F13 (2005)