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Volumn 7, Issue 5-6, 2005, Pages 455-466

Molecular dynamics simulation of the effect of tool edge radius on cutting forces and cutting region in nanoscale ductile cutting of silicon

Author keywords

Molecular dynamics simulation; Nanoscale cutting; Tool edge radius

Indexed keywords

BRITTLENESS; CUTTING TOOLS; INTEGRATED CIRCUITS; LINEAR INTEGRATED CIRCUITS; NANOTECHNOLOGY;

EID: 28844467654     PISSN: 13682148     EISSN: None     Source Type: Journal    
DOI: 10.1504/IJMTM.2005.007697     Document Type: Article
Times cited : (7)

References (25)
  • 2
    • 0002139785 scopus 로고
    • Molecular dynamics model of the orthogonal cutting process
    • Belak, J. and Stowers, I.F. (1990) 'Molecular dynamics model of the orthogonal cutting process', Proc. Am. Soc. Prec. Eng., pp.76-79.
    • (1990) Proc. Am. Soc. Prec. Eng. , pp. 76-79
    • Belak, J.1    Stowers, I.F.2
  • 3
    • 0026154663 scopus 로고
    • Ductile-regime grinding: A new technology for machining brittle materials
    • Bifano, T.G., Dow, T.A. and Scattergood, R.O. (1991) 'Ductile-regime grinding: a new technology for machining brittle materials', Transactions of the ASME, Vol. 113, pp. 184-189.
    • (1991) Transactions of the ASME , vol.113 , pp. 184-189
    • Bifano, T.G.1    Dow, T.A.2    Scattergood, R.O.3
  • 4
  • 5
    • 0041114778 scopus 로고
    • Effect of very high pressures on glass
    • Bridgman, P.M (1953) 'Effect of very high pressures on glass', J. Appl. Phys., Vol. 24, pp.405-413.
    • (1953) J. Appl. Phys. , vol.24 , pp. 405-413
    • Bridgman, P.M.1
  • 6
    • 0034274514 scopus 로고    scopus 로고
    • Molecular dynamics simulation of phase transformation in silicon monocrystals due to nano-indentation
    • Cheong, W.C.D. and Zhang, L.C. (2000) 'Molecular dynamics simulation of phase transformation in silicon monocrystals due to nano-indentation', Nanotechnology, Vol. 11, pp. 173-180.
    • (2000) Nanotechnology , vol.11 , pp. 173-180
    • Cheong, W.C.D.1    Zhang, L.C.2
  • 7
    • 0037388602 scopus 로고    scopus 로고
    • Slip-line modeling of machining with a rounded-edge tool - Part I: New model and theory
    • Fang, N. (2003) 'Slip-line modeling of machining with a rounded-edge tool - Part I: new model and theory', Journal of the Mechanics and Physics of Solids, Vol. 51, pp.715-742.
    • (2003) Journal of the Mechanics and Physics of Solids , vol.51 , pp. 715-742
    • Fang, N.1
  • 8
    • 0034275536 scopus 로고    scopus 로고
    • Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale
    • Fang, T.H. and Weng, C. (2000) 'Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale', Nanotechnology, Vol. 11, pp. 148-153.
    • (2000) Nanotechnology , vol.11 , pp. 148-153
    • Fang, T.H.1    Weng, C.2
  • 9
    • 0000932853 scopus 로고
    • Interface tribology by nonequilibrium molecular dynamics fabrication technology
    • Hoover, W.G., Hoover, C.G. and Stowers, I.F. (1989) 'Interface tribology by nonequilibrium molecular dynamics fabrication technology', Mater Res. Soc. Symp., Vol. 140, pp.119-122.
    • (1989) Mater Res. Soc. Symp. , vol.140 , pp. 119-122
    • Hoover, W.G.1    Hoover, C.G.2    Stowers, I.F.3
  • 10
    • 0025846563 scopus 로고
    • An atomistic analysis of nanometric chip removal as affected by tool-work interaction in diamond turning
    • Ikawa, N., Shimada, S., Tanaka, H. and Ohmori, G (1991) 'An atomistic analysis of nanometric chip removal as affected by tool-work interaction in diamond turning', Ann. CIRP, Vol. 40, pp.551-554.
    • (1991) Ann. CIRP , vol.40 , pp. 551-554
    • Ikawa, N.1    Shimada, S.2    Tanaka, H.3    Ohmori, G.4
  • 11
    • 0030689371 scopus 로고    scopus 로고
    • Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon
    • Inamura, T., Shimada, S. and Nakahara, N. (1997) 'Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon', Annals of the CIRP, Vol. 46, pp.31-34.
    • (1997) Annals of the CIRP , vol.46 , pp. 31-34
    • Inamura, T.1    Shimada, S.2    Nakahara, N.3
  • 12
    • 0032689334 scopus 로고    scopus 로고
    • Crack iniation in machining monocrystalline silicon
    • Inamura, T., Shimada, S., Takezawa, N. and Ikawa, N. (1999) 'Crack iniation in machining monocrystalline silicon', Annals of the CIRP, Vol. 48, pp.81-84.
    • (1999) Annals of the CIRP , vol.48 , pp. 81-84
    • Inamura, T.1    Shimada, S.2    Takezawa, N.3    Ikawa, N.4
  • 13
    • 0034256170 scopus 로고    scopus 로고
    • Brittle to ductile transition dependence upon the transition pressure valued of semiconductors in micromachining
    • Jasinevicius, R.G., Pizani, P.S. and Duduch, J.G. (2000) 'Brittle to ductile transition dependence upon the transition pressure valued of semiconductors in micromachining', J. Mater. Res., Vol. 15, pp. 1688-1692.
    • (2000) J. Mater. Res. , vol.15 , pp. 1688-1692
    • Jasinevicius, R.G.1    Pizani, P.S.2    Duduch, J.G.3
  • 14
    • 0040676816 scopus 로고    scopus 로고
    • A finite-element analysis for machining with the tool edge considered
    • Kim, K.W., Lee, W.Y. and Sin, H. (1997) 'A finite-element analysis for machining with the tool edge considered', J. Mater. Process. Technol., Vol.86, pp.45-55.
    • (1997) J. Mater. Process. Technol. , vol.86 , pp. 45-55
    • Kim, K.W.1    Lee, W.Y.2    Sin, H.3
  • 15
    • 0032483165 scopus 로고    scopus 로고
    • Effect of tool geometry in nanometric cutting: A molecular dynamics simulation approach
    • Komanduri, R., Chandrasekaran, N. and Raff, L.M. (1998) 'Effect of tool geometry in nanometric cutting: a molecular dynamics simulation approach', Wear, Vol. 219, pp.84-97.
    • (1998) Wear , vol.219 , pp. 84-97
    • Komanduri, R.1    Chandrasekaran, N.2    Raff, L.M.3
  • 16
    • 0035783643 scopus 로고    scopus 로고
    • Molecular dynamics simulation of the nanometric cutting of silicon
    • Komanduri, R., Chandrasekaran, N. and Raff, L.M. (2001) 'Molecular dynamics simulation of the nanometric cutting of silicon', Philosophical Magazine B, Vol. 81, pp. 1989-2019.
    • (2001) Philosophical Magazine B , vol.81 , pp. 1989-2019
    • Komanduri, R.1    Chandrasekaran, N.2    Raff, L.M.3
  • 17
    • 0042275170 scopus 로고    scopus 로고
    • Modeling of ductile cutting of tungsten carbide
    • Liu, K. and Li, X.P. (2001) 'Modeling of ductile cutting of tungsten carbide', Transactions of NAMRI/SME, Vol. 29, pp.251-258.
    • (2001) Transactions of NAMRI/SME , vol.29 , pp. 251-258
    • Liu, K.1    Li, X.P.2
  • 18
    • 0028099128 scopus 로고
    • Molecular dynamics simulation for abrasive process
    • Rentch, R. and Inasaki, I. (1994) 'Molecular dynamics simulation for abrasive process', Annals of the CIRP, Vol. 43, pp.327-330.
    • (1994) Annals of the CIRP , vol.43 , pp. 327-330
    • Rentch, R.1    Inasaki, I.2
  • 19
    • 0002331142 scopus 로고
    • Molecular dynamics analysis of nanometric cutting process
    • Shimada, S. (1995) 'Molecular dynamics analysis of nanometric cutting process', Int. J. Japan. Soc. Prec. Eng., Vol. 29, pp.283-286.
    • (1995) Int. J. Japan. Soc. Prec. Eng. , vol.29 , pp. 283-286
    • Shimada, S.1
  • 20
    • 0028136011 scopus 로고
    • Structure of micromachined surface simulated by molecular dynamics analysis
    • Shimada, S., Ikawa, N., Ohmori, G., Tanaka H. and Uchikoshi, J. (1994) 'Structure of micromachined surface simulated by molecular dynamics analysis', Ann. CIRP, Vol. 43, pp.51-54.
    • (1994) Ann. CIRP , vol.43 , pp. 51-54
    • Shimada, S.1    Ikawa, N.2    Ohmori, G.3    Tanaka, H.4    Uchikoshi, J.5
  • 21
    • 0038818989 scopus 로고    scopus 로고
    • Feasible of gentle mode machining of brittle materials and its condition
    • Shirakashi, T. and Obikawa, T. (2003) 'Feasible of gentle mode machining of brittle materials and its condition', Journal of Materials Processing Technology, Vol. 138, pp.522-526.
    • (2003) Journal of Materials Processing Technology , vol.138 , pp. 522-526
    • Shirakashi, T.1    Obikawa, T.2
  • 22
    • 27744577658 scopus 로고
    • Modeling solid-state chemistry: Interatomic potentials for multicomponent systems
    • Tersoff, J. (1989) 'Modeling solid-state chemistry: interatomic potentials for multicomponent systems', Physical Review B, Vol. 39, pp.5566-5568.
    • (1989) Physical Review B , vol.39 , pp. 5566-5568
    • Tersoff, J.1
  • 23
    • 0037347678 scopus 로고    scopus 로고
    • Molecular dynamics simulation of nanoscale machining of copper
    • Ye, Y.Y., Biswas, R., Morris, J.R., Bastawros, A. and Chandra, A. (2003) 'Molecular dynamics simulation of nanoscale machining of copper', Nanotechnology, Vol. 14, pp.390-396.
    • (2003) Nanotechnology , vol.14 , pp. 390-396
    • Ye, Y.Y.1    Biswas, R.2    Morris, J.R.3    Bastawros, A.4    Chandra, A.5
  • 24
    • 0032131262 scopus 로고    scopus 로고
    • Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding
    • Zhang, L.C. and Tanaka, H. (1998) 'Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding', Tribology International, Vol. 31, pp.425-433.
    • (1998) Tribology International , vol.31 , pp. 425-433
    • Zhang, L.C.1    Tanaka, H.2
  • 25
    • 0033324426 scopus 로고    scopus 로고
    • On the mechanics and physics in the nano-indentation of silicon monocrystals
    • Zhang, L.C. and Tanaka, H. (1999) 'On the mechanics and physics in the nano-indentation of silicon monocrystals', JSME International Journal, Vol. 42, pp.546-559.
    • (1999) JSME International Journal , vol.42 , pp. 546-559
    • Zhang, L.C.1    Tanaka, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.