Investigation of thermal effect of microstructures fabricated via focused ion beam raster scanning

International Journal of Nanoscience

Volumn 4, Issue 4, 2005, Pages 537-541

  Fu, Yongqi ^a   Qian, Haixia ^b   Ngoi, Bryan Kok Ann ^b   Zhou, Wei ^b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

FIB; Internal stress; Self organized formation; Thermal effect

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; ION BEAMS; RESIDUAL STRESSES; SPUTTERING; THERMAL EFFECTS;

FOCUSED ION BEAM (FIB); SELF-ORGANIZED FORMATION;

MICROSTRUCTURE;

EID: 28844461765     PISSN: 0219581X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0219581X05003280     Document Type: Article

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